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Device: Autonomous Nano Manufacturing Device

As part of the intellectual cluster creation project, jointly developed with Nagoya University and Nagoya Institute of Technology.

This project is a research initiative aimed at forming a "nanotechnology manufacturing cluster." The objective of the project is to conduct research and development on measurement smart sensors and nano-patterning technology based on a plasma diagnostic technique developed independently by Nagoya University for measuring atomic and molecular concentrations in a reaction space, ultimately leading to the development of an "autonomous nano-manufacturing device" that can automatically perform nano-order ultra-fine processing under optimal conditions at all times.

  • Other mounting machines

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